Advancement of etching and technology for creating three-dimensional structures.
Latest Trends in Wet/Dry Etching and Post-Etching Technologies
This book, like the preface "Mechanisms of Wet Etching and Optimization of Processing Parameters," explains not only the latest technologies but also the fundamentals and practical applications. It is recommended for those who want to learn about wet etching, dry etching, post-etching, and three-dimensional microstructure fabrication techniques.
- Company：S&T出版
- Price：10,000 yen-100,000 yen
